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Plenary Session

CSTIC 2012, Sunday, March 18, 2012
Kerry Hotel, Pudong, Shanghai, China

08:45 – 09:35Opening Ceremony, Grand Shanghai Ballroom 2
 Opening Remarks by Conference Chair
 Opening Remarks by SEMI
 Opening Remarks by ECS
 Opening Remarks by Chinese Government Representatives
 Presentation of SEMI and ECS Best Students and Young Engineers Awards (SESEA Awards)
  
09:35 – 10:20
Plenary Lecture, Grand Shanghai Ballroom 2
Prof. Leo Esaki
Nobel Laureate and IBM Fellow, Chairman, The Science and Technology Promotion Foundation of Ibaraki, Japan
What Did I Explore in Half a Century of Research?
  
10:20 – 10:40Coffee Break
  
10:40 – 11:20
Plenary Lecture, Grand Shanghai Ballroom 2
Dr. Kinam Kim
Samsung Fellow, President and CEO, Samsung Institute of Advanced Technology, Korea
Exploring Si Technology’s Horizon: Challenges and Opportunities
  
11:20 – 12:00
Plenary Lecture, Grand Shanghai Ballroom 2
Dr. Luc Van den hove
President and CEO, IMEC, Belgium
Semiconductors, Core of a Sustainable Amazing World
  
12:00 – 13:30Lunch, Grand Shanghai Ballroom 3
  

Parallel Symposium Oral Sessions

Sunday, March 18, 2012
  
13:30 – 17:00Parallel Symposium Oral Sessions, Pudong Ballroom 1-7 & Function Room 1-4
  
17:00 – 18:30Conference Poster Session, Pudong Ballroom 4
  
Monday, March 19, 2012
  
Symposium II and III Joint Session, Pudong Ballrooms 2 and 3
Session Chairs: Ying Zhang, Kafai Lai
  
08:45-08:50Chairman's opening remarks
  
**8:50-9:20FEOL Etch Challenges for 20 nm Node and Beyond 
Vahid Vahedi, Lam Research, USA
  
**9:20-9:50How to Follow Moore's Law 
Banqiu Wu, AMAT, USA
  
**9:50-10:20Etching Challenges of FEOL Gate Pattterning for 32 nm Node and Beyond 
Ying Zhang, TSMC, Taiwan, China
  
10:20-10:35Coffee Break
  
Symposium IV & VI Joint Session, Pudong Ballrooms 2 and 3
Session chairs: Zhen Guo, Ran Liu
  
**10:35-11:05CMOS Technology Scaling for System-On-Chip Integration – Past, Present and Future 
Chia-Hong Jan, Intel, USA
  
**11:05-11:35Molecular Beam Epitaxy-Scanning Tunneling Microscopy of Unconventional Superconductivity 
Qikun Xue, Tsinghua University, China
  
**11:35-12:05Future Demands on the Process Technology beyond the 16 nm Node 
Mikael Östling, Dean of school of information technology of KTH, IEEE Fellow, Fellow of Royal Institute of Technology, Sweden
  
08:45 – 17:30Parallel Symposium Oral Sessions, Pudong Ballroom 1-7 & Function Room 1-4
  

Symposium I: Design and Device Engineering

Symposium II: Lithography and Patterning

Symposium III: Dry &Wet Etch and Cleaning

Symposium IV: Thin Film Technology

Symposium V: CMP and Post-CMP Cleaning

Symposium VI: Materials and Process Integration for Device and Interconnection

Symposium VII: Packaging and Assembly

Symposium VIII: Metrology, Reliability and Testing

Symposium IX: Emerging Semiconductor Technologies

Symposium X: Advances in MEMS and Sensor Technologies

 
Conference Banquet

Sunday, March 18, 2012
  
19:00 – 21:00Conference Banquet, 小南国嘉里店, Kerry Hotel

Kerry Hotel Floor Layout


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